CMD30-FISMAT: effect of annealing in air, N2 and vacuum on the structure of RF-sputtered WO3-x thin films
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Controlled annealing environments modulate oxygen vacancy populations and local coordination in WO3-x thin films, driving changes in crystallization behavior and electronic structure. Synchrotron X-ray absorption reveals how defect chemistry governs microstructure and lifts W 5d orbital degeneracy.